The newly developed Hybrid Boron mixed Carbon (HBC) foils have been used and tested at the RCS of J-PARC since September of 2007. Two foils approximately 100 microgram per square cm each are sandwiched together to form an equivalent 200 microgram per square cm foil. The sandwiched foil is supported by ~10 micron diameter SiC fibers attached to one-edge titanium target frame. These foils show no problem because of very low foil temperature due to low beam power of 20 kW for stripping of 180 MeV H- ion beam at present. However, the final goal of the beam power will be about 1 MW in near future. For that purpose, we are developing the HBC foils that will have high durability at 2000 K. We will present the foil preparation and lifetime measurements of the HBC, diamond, DLC and CM foils for comparison. Three different ion beam irradiations were used: 3.2 MeV Ne+ DC beam, 650 keV H- DC beams, and 800 MeV H- pulsed beam at the PSR of Los Alamos National Laboratory. The former two beams have almost the same energy deposition as that of the beam at J-PARC.